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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 33, Number 4(1) (2021)
Copyright(C) MYU K.K.
pp. 1199-1207
S&M2527 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2021.3010
Published: April 6, 2021

Simulation-based Design of Quartz Resonator for Bionic Olfactory Sensor [PDF]

Meng Zhao, Jing Ji, and Toshitsugu Ueda

(Received July 31, 2020; Accepted January 28, 2021)

Keywords: bionic sensor, olfactory sensor, quartz resonator, simulation, anisotropic etching

In this paper, we report a bionic olfactory sensor that could be applied for breast cancer detection. This paper mainly focuses on describing the basic principle of the bionic olfactory sensor and introducing the simulation-based design of the sensor. We use an original anisotropic quartz etching simulation system to simulate the etching process of the key parts of the resonator, and thus obtain the key parameters of the quartz etching process of the resonator, so as to control the production accuracy of the quartz resonator and improve the performance of the bionic olfactory sensor.

Corresponding author: Meng Zhao


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Cite this article
Meng Zhao, Jing Ji, and Toshitsugu Ueda, Simulation-based Design of Quartz Resonator for Bionic Olfactory Sensor, Sens. Mater., Vol. 33, No. 4, 2021, p. 1199-1207.



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