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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 33, Number 6(3) (2021)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2073-2082
S&M2594 Research Paper https://doi.org/10.18494/SAM.2021.3256 Published: June 16, 2021 Fabrication and Characterization of High-frequency Vibration Sensor over 6 kHz with Potential for Energy Harvesting [PDF] Lan Zhang, Ryohei Takei, Jian Lu, Daiji Noda, Ryo Ohta, Takeshi Kobayashi, and Toshihiro Itoh (Received March 22, 2021; Accepted May 11, 2021) Keywords: vibration, MEMS, piezoelectric, high frequency, microsensors
We report on the fabrication and characterization of a high-frequency and high-voltage-output microelectromechanical systems (MEMS) vibration sensor with potential for energy harvesting. A novel structure was developed to ensure that the vibration sensor could output a high voltage in the high-frequency vibration domain. Specifically, the device was composed of eight aluminum nitride C-shaped spring flexures, which surrounded and supported a disk proof mass. The vibration sensor was fabricated, and its functional characteristics were comprehensively evaluated at a commercial foundry with an 8-inch MEMS process line. In experiments, the sensor exhibited an extremely high center resonance frequency of up to 6.7 kHz. Moreover, an output voltage of up to 167.8 mV was realized under an acceleration of 1 g.
Corresponding author: Lan Zhang  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Lan Zhang, Ryohei Takei, Jian Lu, Daiji Noda, Ryo Ohta, Takeshi Kobayashi, and Toshihiro Itoh, Fabrication and Characterization of High-frequency Vibration Sensor over 6 kHz with Potential for Energy Harvesting, Sens. Mater., Vol. 33, No. 6, 2021, p. 2073-2082. |
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