pp. 3603-3612
S&M2711 Research Paper of Special Issue https://doi.org/10.18494/SAM.2021.3623 Published: October 20, 2021 Development of Lead-free Force-feedback Tactile Sensor Fabricated from BiFeO3 Piezoelectric Film [PDF] David T. W. Lin, Kun-Dar Li, Po-Chang Chen, and Jia-Yun Kuo (Received May 24, 2021; Accepted October 1, 2021) Keywords: tactile sensor, sol-gel, thin film, BiFeO3
In this study, we develop a flexible lead-free BiFeO3 (BFO) film sensor that can be applied on complex surfaces of devices. This sensor is fabricated by depositing BFO thin film on a polyimide (PI)-coated copper substrate. The sol–gel (SG) method and spin-coating method are utilized to prepare the BFO piezoelectric film. Two different spin-coating processes under three different sets of parameters and two different annealing temperatures are used in the fabrication. X-ray diffraction (XRD) and scanning electron microscopy are used to examine the crystallinity and surface topography of the BFO thin films, respectively. A lifetime test is performed on the device to validate the robustness of its piezoelectric properties, and a linear scaling relationship between the force and output response is obtained. We propose suitable conditions for preparing the piezoelectric film and demonstrate the reliability of this sensor.
Corresponding author: Kun-Dar LiThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article David T. W. Lin, Kun-Dar Li, Po-Chang Chen, and Jia-Yun Kuo, Development of Lead-free Force-feedback Tactile Sensor Fabricated from BiFeO3 Piezoelectric Film, Sens. Mater., Vol. 33, No. 10, 2021, p. 3603-3612. |