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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 34, Number 6(1) (2022)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2015-2023
S&M2951 Research Paper of Special Issue https://doi.org/10.18494/SAM3713 Published in advance: March 22, 2022 Published: June 8, 2022 Optical and Electrical Properties of Mo-doped Zr:ZnO Multilayer Thin Films for Photosensor Applications [PDF] Ming-Yu Yen, Tao-Hsing Chen, Po-Hsun Lai, Sheng-Lung Tu, and Yun-Hwei Shen (Received October 26, 2021; Accepted December 13, 2021) Keywords: Zr:ZnO, molybdenum, multilayer films, radio-frequency magnetron sputtering, vacuum annealing
We investigated the structural, optical, and electrical properties of molybdenum and zirconium-doped zinc oxide (ZZO) with a purity of 99.99% deposited on a glass substrate by radio-frequency magnetron sputtering and annealed at different temperatures. The doping amount of zirconium on ZnO was 3 wt%. The optimal resistivity of the multilayers, 5.1 × 10−3 Ω-cm, was observed for an annealing temperature of 400 °C. This film also had the highest transmittance of 93%. Moreover, the optimal figure of merit, 4.6 × 10−6 Ω−1, was observed for an annealing temperature of 400 °C. Furthermore, the grain size also increased with the annealing temperature, as observed by scanning electron microscopy. Mo/ZZO multilayer thin films with such excellent optical and electrical properties can be applied in photosensors.
Corresponding author: Tao-Hsing Chen  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Ming-Yu Yen, Tao-Hsing Chen, Po-Hsun Lai, Sheng-Lung Tu, and Yun-Hwei Shen, Optical and Electrical Properties of Mo-doped Zr:ZnO Multilayer Thin Films for Photosensor Applications, Sens. Mater., Vol. 34, No. 6, 2022, p. 2015-2023. |
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