S&M2907 Research Paper
Published: April 14, 2022
Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks [PDF]
Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi
(Received January 14, 2022; Accepted March 2, 2022)
Keywords: IoT, MEMS, vibrational energy harvester, electret, miniaturization
In this paper, a vibrational energy harvester formed in a double-deck structure is presented. Comb electrodes covered with an electret skin are located in the active layer of a silicon on insulator (SOI) wafer, and suspensions are formed in the handle layer, thereby reducing the footprint to 62% of that of the previous model. For electrical interconnection between the SOI and handle layers, part of the SOI layer is formed into a cantilever that is designed to adhere to the substrate. When the device is mechanically excited by sinusoidal acceleration of 0.18 G (1 G = 9.8 m/s2), it generates a power of 13.2 µW, corresponding to a normalized power density (NPD) of 1.23 mW/cm3/G2.Corresponding author: Hiroaki Honma
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Cite this article
Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks , Sens. Mater., Vol. 34, No. 4, 2022, p. 1527-1538.