Young Researcher Paper Award 2023
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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 34, Number 4(3) (2022)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 1527-1538
S&M2907 Research Paper https://doi.org/10.18494/SAM3785 Published: April 14, 2022 Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks [PDF] Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi (Received January 14, 2022; Accepted March 2, 2022) Keywords: IoT, MEMS, vibrational energy harvester, electret, miniaturization
In this paper, a vibrational energy harvester formed in a double-deck structure is presented. Comb electrodes covered with an electret skin are located in the active layer of a silicon on insulator (SOI) wafer, and suspensions are formed in the handle layer, thereby reducing the footprint to 62% of that of the previous model. For electrical interconnection between the SOI and handle layers, part of the SOI layer is formed into a cantilever that is designed to adhere to the substrate. When the device is mechanically excited by sinusoidal acceleration of 0.18 G (1 G = 9.8 m/s2), it generates a power of 13.2 µW, corresponding to a normalized power density (NPD) of 1.23 mW/cm3/G2.
Corresponding author: Hiroaki Honma  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks , Sens. Mater., Vol. 34, No. 4, 2022, p. 1527-1538. |
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