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Notice of retraction
Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 34, Number 4(3) (2022)
Copyright(C) MYU K.K.
pp. 1527-1538
S&M2907 Research Paper
https://doi.org/10.18494/SAM3785
Published: April 14, 2022

Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks [PDF]

Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi

(Received January 14, 2022; Accepted March 2, 2022)

Keywords: IoT, MEMS, vibrational energy harvester, electret, miniaturization

In this paper, a vibrational energy harvester formed in a double-deck structure is presented. Comb electrodes covered with an electret skin are located in the active layer of a silicon on insulator (SOI) wafer, and suspensions are formed in the handle layer, thereby reducing the footprint to 62% of that of the previous model. For electrical interconnection between the SOI and handle layers, part of the SOI layer is formed into a cantilever that is designed to adhere to the substrate. When the device is mechanically excited by sinusoidal acceleration of 0.18 G (1 G = 9.8 m/s2), it generates a power of 13.2 µW, corresponding to a normalized power density (NPD) of 1.23 mW/cm3/G2.

Corresponding author: Hiroaki Honma


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Cite this article
Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks , Sens. Mater., Vol. 34, No. 4, 2022, p. 1527-1538.



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