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S&M3264 Research Paper of Special Issue https://doi.org/10.18494/SAM4001 Published: May 12, 2023 Modulation of Gate Work Function of Devices for Protection Against Electrostatic Discharge [PDF] Yan Wu, Ruizhen Wu, Yintang Yang, Yi Liu, Yaping Yue, and Lin Wang (Received June 28, 2022; Accepted December 7, 2022) Keywords: electrostatic discharge (ESD), leakage current, silicon controlled rectifier (SCR), trigger voltage, work function
Electrostatic discharge (ESD) events are causing an increasing amount of damage in advanced integrated circuits (ICs). Among the onchip ESD protection devices, the silicon controlled rectifier (SCR) is the most robust. We have proposed a new SCR with an embedded n-type metal-oxide-semiconductor field-effect transistor (nMOSFET). By properly adjusting the gate work function of the nMOSFET, the SCR obtains a low trigger voltage of 1.5 V and a low leakage current of 7.6 × 10−10 A. The overshoot voltage under a fast ESD event is also reduced owing to the strong conduction of the nMOSFET. By numerical simulation, we evaluate the impact of the temperature, noise, and stress waveform on the ESD performance. The results are discussed and detailed physical insights are given.
Corresponding author: Ruizhen WuThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Yan Wu, Ruizhen Wu, Yintang Yang, Yi Liu, Yaping Yue, and Lin Wang, Modulation of Gate Work Function of Devices for Protection Against Electrostatic Discharge, Sens. Mater., Vol. 35, No. 5, 2023, p. 1509-1517. |