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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 35, Number 6(2) (2023)
Copyright(C) MYU K.K.
pp. 1957-1983
S&M3301 Research Paper of Special Issue
https://doi.org/10.18494/SAM4367
Published: June 27, 2023

Electret MEMS Vibration Energy Harvester with Reconfigurable Frequency Response [PDF]

Gen Hashiguchi and Hiroshi Toshiyoshi

(Received March 1, 2023; Accepted April 25, 2023)

Keywords: MEMS, vibrational energy harvester, electret, wide bandwidth, reconfigurable frequency response

We demonstrate a microelectromechanical systems (MEMS) electret-type vibrational energy harvester with a wide bandwidth between 25 and 60 Hz (span of 35 Hz) for a small sinusoidal acceleration of less than 10 mG (G = 9.8 m/s2). We have developed a method of tailoring the nonlinear characteristics by adjusting the mutual position of the opposing electrodes. Both soft- and hard-spring effects are realized, thereby further extending the frequency bandwidth between 25 and 95 Hz so that power can be effectively retrieved from extremely small vibrations of 10 mG. This reconfigurable nature of the developed harvester device is suitable for autonomous distributed sensors that obtain power from environmental vibrations.

Corresponding author: Gen Hashiguchi


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Cite this article
Gen Hashiguchi and Hiroshi Toshiyoshi , Electret MEMS Vibration Energy Harvester with Reconfigurable Frequency Response , Sens. Mater., Vol. 35, No. 6, 2023, p. 1957-1983.



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