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Sensors and Materials
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Sensors and Materials, Volume 19, Number 2 (2007)
Copyright(C) MYU K.K.
pp. 107-121
S&M669 Research Paper
Published: 2007

Transverse Electromagnetic Microactuators Using Electroplated Planar Coil Driven by Symmetric Twin Magnets [PDF]

Ji-Chul Ryu and Young-Ho Cho

(Received September 20, 2006; Accepted February 21, 2007)

Keywords: electromagnetic microactuator, radial magnetic field, twin magnets, electroplating

In this paper, we present an electromagnetic microactuator that uses an electroplated copper coil on a p+-silicon diaphragm with symmetric twin magnets. The microactuator generates a vertical motion of the diaphragm using the radial components of the magnetic field on the coil plane. To guide and concentrate the magnetic field in the radial direction, we propose a new microactuator structure with symmetric twin magnets. The microactuator shows values of resonant frequency and quality factor in the ranges of 10.51±0.22 kHz and 46.6±3.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4 µm for an AC rms current of 26.8 mA, showing 2.4 times larger amplitude than the single magnet microactuator.

Corresponding author: Young-Ho Cho


Cite this article
Ji-Chul Ryu and Young-Ho Cho, Transverse Electromagnetic Microactuators Using Electroplated Planar Coil Driven by Symmetric Twin Magnets, Sens. Mater., Vol. 19, No. 2, 2007, p. 107-121.



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