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Notice of retraction
Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 36, Number 5(1) (2024)
Copyright(C) MYU K.K.
pp. 1859-1868
S&M3640 Research Paper of Special Issue
https://doi.org/10.18494/SAM4804
Published: May 15, 2024

Microheaters for Thermal Analysis and Gas Sensing Applications [PDF]

Bo-Ming Huang, Yu-Jen Hsiao, Sheng-Chang Wang, and Meichun Lin

(Received October 30, 2023; Accepted April 17, 2024)

Keywords: MEMS, microheater, ANSYS, gas sensor

In this study, we primarily focus on the design and fabrication of microheaters for bottom-heating applications combined with gas sensing. Our main objectives are to analyze energy consumption and temperature distribution, utilizing this microheater component for development and simulation. In the design of microheaters, we employ finite element analysis using ANSYS to simulate the geometric designs of microheaters. The results obtained, which reveal the temperature distribution within a 400 μm² region at 300 °C, provide insights into the temperature distribution on the sensing membrane. The fabrication is carried out using MEMS technology, followed by validation. Furthermore, sensitivity testing is performed on gas sensors for volatile organic compounds in the range from 0.2 to 1 ppm, resulting in an increase from 12.2 to 89.7%.

Corresponding author: Yu-Jen Hsiao


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Cite this article
Bo-Ming Huang, Yu-Jen Hsiao, Sheng-Chang Wang, and Meichun Lin, Microheaters for Thermal Analysis and Gas Sensing Applications, Sens. Mater., Vol. 36, No. 5, 2024, p. 1859-1868.



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