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S&M3675 Research Paper of Special Issue https://doi.org/10.18494/SAM5101 Published: June 18, 2024 Using COMSOL to Simulate the Effects of Different Parameters on the Sense Characteristics of Capacitive Single-axis Accelerometers [PDF] Lian-lian Ye, Shao-Jun Luo, Rui-Zhi Shi, Cheng-Fu Yang, Hsien-Wei Tseng (Received April 30, 2024; Accepted May 30, 2024) Keywords: different parameters, sensing characteristics, ADXL150, differential capacitive bridge accelerometer
In this study, we employed the finite element software COMSOL Multiphysics® (version 6.0) as a simulation tool to analyze the characteristics of accelerometers with different structures. The initial investigation centered around the 114 μm movable comb electrodes of the ADXL150 accelerometer, known for its single-axis differential capacitive bridge design. These electrodes were chosen as the baseline for our study. Our main goal was to examine how alterations in both the length of the movable comb electrodes and the acceleration rates affect the sensing voltage and displacement of the accelerometers. In this investigation, we aimed to provide a comprehensive understanding of the interplay between electrode length variations and acceleration rates on accelerometer performance. At the outset, our aim was to investigate how varying the length of the electrodes would affect the performance of the accelerometer. We methodically decreased the length of the movable comb electrodes from 114 to 20 μm and increased them from 114 to 129 μm. This range of electrode lengths allowed us to observe and analyze the corresponding variations in sensing voltages across different acceleration rates, namely, 25 g, 50 g, and 75 g. Also, the displacements and von Mises stresses under these different acceleration rates and with lengths of the moveable comb electrodes were also investigated in this study.
Corresponding author: Cheng-Fu YangThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Lian-lian Ye, Shao-Jun Luo, Rui-Zhi Shi, Cheng-Fu Yang, Hsien-Wei Tseng, Using COMSOL to Simulate the Effects of Different Parameters on the Sense Characteristics of Capacitive Single-axis Accelerometers, Sens. Mater., Vol. 36, No. 6, 2024, p. 2381-2390. |