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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 36, Number 8(3) (2024)
Copyright(C) MYU K.K.
pp. 3445-3452
S&M3743 Research Paper of Special Issue
https://doi.org/10.18494/SAM5165
Published: August 16, 2024

Noncontact Temperature Measurement of Metal Surfaces Using Reflected Laser Beam [PDF]

Taichi Murakami, Masaki Shimofuri, Toshiyuki Tsuchiya, and Shugo Miyake

(Received May 31, 2024; Accepted June 24, 2024)

Keywords: thermoreflectance, microscale spatial resolution, metal thin film, modulation-free heating

A temperature measurement system with a reflected laser beam that does not require temperature modulation was developed for the thermal design of electronic devices. The system combines a balanced photodetector and lock-in amplifier to make reflectance change measurements possible with an extremely high signal-to-noise ratio. First, to evaluate the accuracy of the reflectance change measurement, the reflectance change of a Ni thin film temperature-controlled by a heater and thermocouples was measured as a function of temperature change. To evaluate the accuracy of the temperature change measurement, the reflectance change was measured by heating a Ni thin film that imitated the wiring pattern of an electronic circuit. The experimental results showed that the standard deviation of the ratio of reflectance change from the reference reflectance was <1.00 × 10−5 at a constant temperature. Moreover, the error margin of the calculated temperature change was ±1.0% for a change of 22 °C or more from the reference temperature, and the performance was sufficient for the estimation of local temperature.

Corresponding author: Shugo Miyake


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Cite this article
Taichi Murakami, Masaki Shimofuri, Toshiyuki Tsuchiya, and Shugo Miyake, Noncontact Temperature Measurement of Metal Surfaces Using Reflected Laser Beam, Sens. Mater., Vol. 36, No. 8, 2024, p. 3445-3452.



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