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S&M3857 Research Paper of Special Issue https://doi.org/10.18494/SAM5241 Published: December 3, 2024 MEMS Tactile Sensor for Mimicking the Response of Human Tactile Sensation [PDF] Ryusuke Mitobe, Zhikai Geng, Takashi Abe, Kensuke Kanda, and Masayuki Sohgawa (Received July 16, 2024; Accepted August 28, 2024) Keywords: tactile sensor, MEMS, PZT, strain gauge, human tactile sensation
We report on the evaluation and measurement of a MEMS tactile sensor designed to mimic the temporal feature detection of human tactile sensation. The proposed sensor consists of a strain-resistive gauge and a piezoelectric thin-film capacitor on a microcantilever embedded in an elastomer. The cantilever is deflected by a force, which is detected simultaneously by the two separate sensing elements: the strain gauge and the piezoelectric thin film (piezoelectric sensor). The DC resistance change of the strain gauge is detected in time synchrony with the applied force. On the other hand, the piezoelectric sensor outputs a voltage owing to the formation of a polarized charge in response to the time variation of the applied force, and thus shows a time response different from that of the strain gauge. These could potentially reproduce the time-responsive nature of the human tactile function, which has receptive fields with different stimulus adaptation speeds. In this work, we demonstrated that different time response patterns can be obtained from each sensing element for the application of a single force or vibration.
Corresponding author: Masayuki SohgawaThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Ryusuke Mitobe, Zhikai Geng, Takashi Abe, Kensuke Kanda, and Masayuki Sohgawa, MEMS Tactile Sensor for Mimicking the Response of Human Tactile Sensation, Sens. Mater., Vol. 36, No. 12, 2024, p. 5129-5141. |