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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 37, Number 8(3) (2025)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 3651-3660
S&M4143 Research paper of Special Issue https://doi.org/10.18494/SAM5732 Published: August 21, 2025 UV-C Light Detection in Aluminum Gallium Oxide Metal–Semiconductor–Metal Photodetectors [PDF] Tsung-I Liao, Sheng-Po Chang, and Shoou-Jinn Chang (Received May 9, 2025; Accepted August 4, 2025) Keywords: transparent oxide semiconductors (TOSs), aluminum gallium oxide (AGO), UV photodetectors, co-sputtering
In this work, we fabricated aluminum gallium oxide (AGO) metal–semiconductor–metal photodetectors (PDs) with different RF powers of Ga₂O₃ target (PGa), and their characteristics were investigated and discussed. At PGa below 160 W, the PDs exhibited high resistance across the whole range of wavelengths. When PGa increases to 160 W or higher, both the response and rejection ratio improve significantly. The optimal photoresponse occurs when the DC power of Al is 80 W and PGa is 180 W, with the rejection ratio about 105, the responsivity 0.2 mA/W, the rise time less than 1 s, and the decay time less than 0.1 s. Additionally, the optimal AGO PDs have high stability and repeatability demonstrated in the time-resolved response.
Corresponding author: Sheng-Po Chang  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Tsung-I Liao, Sheng-Po Chang, and Shoou-Jinn Chang, UV-C Light Detection in Aluminum Gallium Oxide Metal–Semiconductor–Metal Photodetectors , Sens. Mater., Vol. 37, No. 8, 2025, p. 3651-3660. |
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