pp. 121-133
S&M832 Research Paper https://doi.org/10.18494/SAM.2011.686 Published: March 1, 2011 In-Phase Coupling Forces Induced by Air Flow and Drive Force in Split-Mode Silicon Micromachined Linear Vibratory Gyroscopes [PDF] Wenwen Zhou, Bin Zhou, Zhiyong Chen and Rong Zhang (Received March 1, 2010; Accepted June 17, 2010) Keywords: coupling forces, air damping, vacuum package, vibratory microgyroscopes
In this paper, we report on the sources, variations and identification of in-phase coupling forces induced by air flow and drive force in split-mode silicon micromachined linear vibratory gyroscopes. Air damping coupling force and drive coupling force are two main components of in-phase coupling forces, derived from air flow and fabrication imperfections, respectively. The expression of in-phase coupling forces induced by these two factors is given and their existence is demonstrated by a novel coupling identification method. Experimental data indicate that air damping coupling is the dominant coupling force in in-phase coupling. The sensitivity of in-phase coupling to vacuum will be a theoretical instruction to packaging requirements and 1 Torr is an optimum vacuum not requiring complex packaging technology, but restraining in-phase coupling forces effectively.
Corresponding author: Rong ZhangCite this article Wenwen Zhou, Bin Zhou, Zhiyong Chen and Rong Zhang, In-Phase Coupling Forces Induced by Air Flow and Drive Force in Split-Mode Silicon Micromachined Linear Vibratory Gyroscopes, Sens. Mater., Vol. 23, No. 2, 2011, p. 121-133. |