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Notice of retraction
Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 23, Number 2 (2011)
Copyright(C) MYU K.K.
pp. 121-133
S&M832 Research Paper
https://doi.org/10.18494/SAM.2011.686
Published: March 1, 2011

In-Phase Coupling Forces Induced by Air Flow and Drive Force in Split-Mode Silicon Micromachined Linear Vibratory Gyroscopes [PDF]

Wenwen Zhou, Bin Zhou, Zhiyong Chen and Rong Zhang

(Received March 1, 2010; Accepted June 17, 2010)

Keywords: coupling forces, air damping, vacuum package, vibratory microgyroscopes

In this paper, we report on the sources, variations and identification of in-phase coupling forces induced by air flow and drive force in split-mode silicon micromachined linear vibratory gyroscopes. Air damping coupling force and drive coupling force are two main components of in-phase coupling forces, derived from air flow and fabrication imperfections, respectively. The expression of in-phase coupling forces induced by these two factors is given and their existence is demonstrated by a novel coupling identification method. Experimental data indicate that air damping coupling is the dominant coupling force in in-phase coupling. The sensitivity of in-phase coupling to vacuum will be a theoretical instruction to packaging requirements and 1 Torr is an optimum vacuum not requiring complex packaging technology, but restraining in-phase coupling forces effectively.

Corresponding author: Rong Zhang


Cite this article
Wenwen Zhou, Bin Zhou, Zhiyong Chen and Rong Zhang, In-Phase Coupling Forces Induced by Air Flow and Drive Force in Split-Mode Silicon Micromachined Linear Vibratory Gyroscopes, Sens. Mater., Vol. 23, No. 2, 2011, p. 121-133.



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