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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 25, Number 7 (2013)
Copyright(C) MYU K.K.
pp. 471-477
S&M940 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2013.859
Published: September 24, 2013

Development of New Oxygen Sensor by Microfabrication of Single-Crystal CuFeTe2 Thin Films [PDF]

Masatoshi Kozaki, Yuichiro Higuchi, Akihiro Ikeda, Hisao Kuriyaki and Kiyoshi Toko

(Received October 11, 2012; Accepted December 27, 2012)

Keywords: oxygen, gas sensor, intercalation, layered material, microfabrication

A new oxygen sensor based on resistance change caused by oxygen intercalation for the layered compound CuFeTe2 (CFT) was developed. A microfabrication process for forming many fine pores on the surface of single-crystal CFT thin films by performing wet etching using photolithography was developed with the aim of reducing the response time of the oxygen sensor. A reproducible response of the fabricated samples to oxygen gas was confirmed when 20% oxygen gas and nitrogen gas were alternately introduced into the sample chamber. The microfabricated sample of the single-crystal CFT thin films showed a response time of 2.5 min to 20% oxygen gas, approximately 34% of that of the single-crystal CFT thin films without fine pores.

Corresponding author: Masatoshi Kozaki


Cite this article
Masatoshi Kozaki, Yuichiro Higuchi, Akihiro Ikeda, Hisao Kuriyaki and Kiyoshi Toko, Development of New Oxygen Sensor by Microfabrication of Single-Crystal CuFeTe2 Thin Films, Sens. Mater., Vol. 25, No. 7, 2013, p. 471-477.



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