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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 25, Number 7 (2013)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 471-477
S&M940 Research Paper of Special Issue https://doi.org/10.18494/SAM.2013.859 Published: September 24, 2013 Development of New Oxygen Sensor by Microfabrication of Single-Crystal CuFeTe2 Thin Films [PDF] Masatoshi Kozaki, Yuichiro Higuchi, Akihiro Ikeda, Hisao Kuriyaki and Kiyoshi Toko (Received October 11, 2012; Accepted December 27, 2012) Keywords: oxygen, gas sensor, intercalation, layered material, microfabrication
A new oxygen sensor based on resistance change caused by oxygen intercalation for the layered compound CuFeTe2 (CFT) was developed. A microfabrication process for forming many fine pores on the surface of single-crystal CFT thin films by performing wet etching using photolithography was developed with the aim of reducing the response time of the oxygen sensor. A reproducible response of the fabricated samples to oxygen gas was confirmed when 20% oxygen gas and nitrogen gas were alternately introduced into the sample chamber. The microfabricated sample of the single-crystal CFT thin films showed a response time of 2.5 min to 20% oxygen gas, approximately 34% of that of the single-crystal CFT thin films without fine pores.
Corresponding author: Masatoshi Kozaki Cite this article Masatoshi Kozaki, Yuichiro Higuchi, Akihiro Ikeda, Hisao Kuriyaki and Kiyoshi Toko, Development of New Oxygen Sensor by Microfabrication of Single-Crystal CuFeTe2 Thin Films, Sens. Mater., Vol. 25, No. 7, 2013, p. 471-477. |
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