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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
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Sensors and Materials, Volume 25, Number 6 (2013)
Copyright(C) MYU K.K.
pp. 417-422
S&M935 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2013.875
Published: August 26, 2013

Improved Small-Angle Sensor Based on Total-Internal Reflection and Surface Plasmon Resonance in Heterodyne Interferometry [PDF]

Shinn-Fwu Wang, Hung-Shing Tsai, Yi Chu, Jeng-Hua Wei, Yuan-Fong Chau, An-Li Liu and Fu-Hsi Kao

(Received November 5, 2012; Accepted February 4, 2013)

Keywords: small-angle measurement, total-internal reflection (TIR), heterodyne interferometry (HI), surface plasmon resonance (SPR), Kretchmann's configuration

In this paper, an improved small-angle sensor based on total-internal reflection (TIR) and surface plasmon resonance (SPR) in heterodyne interferometry (HI) is proposed. The improved small-angle sensor is designed as a reflective elongated prism made of BK7 glass. The shorter-side surface of the reflective elongated prism was coated with a 2 nm Ti film and a 45.5 nm Au film, but the longer-side surface was not coated with metal films. With the new small-angle sensor, a small rotation angle can be obtained simply by measuring the phase difference between the p-and s-polarization lights owing to the effects of multiple attenuated total reflections (ATRs) and TIRs. Its angular resolution can reach 2.95×10−7 rad at least. Moreover, the improved small-angle sensor is very stable because its common optical path is insensitive to environmental disturbances. The improved small-angle sensor has some advantages, such as high resolution, high sensitivity, stability, and real-time testing.

Corresponding author: Shinn-Fwu Wang


Cite this article
Shinn-Fwu Wang, Hung-Shing Tsai, Yi Chu, Jeng-Hua Wei, Yuan-Fong Chau, An-Li Liu and Fu-Hsi Kao, Improved Small-Angle Sensor Based on Total-Internal Reflection and Surface Plasmon Resonance in Heterodyne Interferometry, Sens. Mater., Vol. 25, No. 6, 2013, p. 417-422.



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