pp. 601-608
S&M953 Research Paper of Special Issue https://doi.org/10.18494/SAM.2013.923 Published: December 16, 2013 Torque Measurement Device Using an Integrated Microdisplacement Sensor [PDF] Takuma Iwasaki, Toshihiro Takeshita, Yuji Arinaga and Renshi Sawada (Received June 12, 2013; Accepted August 22, 2013) Keywords: MEMS, robot arm, sensor, torque
In this paper, we propose a torque measurement device embedded in robot arms. The device uses an integrated microdisplacement sensor and trapezoidal frame. The sensor tip of 3 mm area and 0.7 mm thickness measures the mirror tilt angle on the underside of the frame caused by a torque applied to the frame. We have successfully measured a linear output change for the torque and found that the gradient of the output change differed largely from the material and the corner angle of the frame.
Corresponding author: Takuma IwasakiCite this article Takuma Iwasaki, Toshihiro Takeshita, Yuji Arinaga and Renshi Sawada, Torque Measurement Device Using an Integrated Microdisplacement Sensor, Sens. Mater., Vol. 25, No. 9, 2013, p. 601-608. |