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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
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Sensors and Materials, Volume 25, Number 9 (2013)
Copyright(C) MYU K.K.
pp. 601-608
S&M953 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2013.923
Published: December 16, 2013

Torque Measurement Device Using an Integrated Microdisplacement Sensor [PDF]

Takuma Iwasaki, Toshihiro Takeshita, Yuji Arinaga and Renshi Sawada

(Received June 12, 2013; Accepted August 22, 2013)

Keywords: MEMS, robot arm, sensor, torque

In this paper, we propose a torque measurement device embedded in robot arms. The device uses an integrated microdisplacement sensor and trapezoidal frame. The sensor tip of 3 mm area and 0.7 mm thickness measures the mirror tilt angle on the underside of the frame caused by a torque applied to the frame. We have successfully measured a linear output change for the torque and found that the gradient of the output change differed largely from the material and the corner angle of the frame.

Corresponding author: Takuma Iwasaki


Cite this article
Takuma Iwasaki, Toshihiro Takeshita, Yuji Arinaga and Renshi Sawada, Torque Measurement Device Using an Integrated Microdisplacement Sensor, Sens. Mater., Vol. 25, No. 9, 2013, p. 601-608.



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