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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 16, Number 3 (2004)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 159-169
S&M554 Research Paper in Biosensors and Related Areas Published: 2004 Surface Micromachined Pressure Sensing Structures with Biocompatible Interface [PDF] Ebin Liao, Simon Ang, Andrew Tay Ah Ong, Yung C. Liang and Adrian Yap U. Jin (Received December 18, 2003; Accepted May 13, 2004) Keywords: temporomandibular disorder, surface micromachining, pressure sensor, biocompatible interface
Surface micromachined poly-Si pressure-sensing structures with biocompatible interfaces were developed for therapy of temporomandibular disorder (TMD). These structures made use of poly-Si suspended bridges, modified bridges with etching holes, and crossing bridges as flexible capacitor plates. Two biocompatible materials were considered as the interfaces between the pressure-sensing structures and the tooth. Optimization and testing were conducted on different sensor schemes, and the measurements were compared with the simulation results. Compared with conventional methods, this microsensor enables the continuous monitoring of the grinding activities of TMD patients and is less injurious to the patients.
Corresponding author: Ebin Liao Cite this article Ebin Liao, Simon Ang, Andrew Tay Ah Ong, Yung C. Liang and Adrian Yap U. Jin, Surface Micromachined Pressure Sensing Structures with Biocompatible Interface, Sens. Mater., Vol. 16, No. 3, 2004, p. 159-169. |
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- Deep Learning Prediction Model of Mortality Including Brain-type Natriuretic Peptide in Patients with Acute Decompensated Heart Failure
Hirotaka Takizawa, Masatoshi Minamisawa, Hirohiko Motoki, Koichiro Kuwahara, and Masaki Yamaguchi
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