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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 16, Number 4 (2004)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 191-198
S&M557 Research Paper of Special Issue Published: 2004 Bolometer-Type Infrared Sensors Fabricated by Plasmaless Dry Etching [PDF] Yoji Saito and Hiroki Murotani (Received March 9, 2004; Accepted June 29, 2004) Keywords: chlorine trifluoride, polycrystalline silicon film, bolometer, FTIR
Bolometer-type infrared (IR) sensors were fabricated using undoped polycrystalline silicon (poly-Si) films, the temperature coefficient of resistance of which was 7 %/K. The device size was 50 × 50 µm2. A bridge structure with an air gap about 50 µm deep was formed to reduce thermal conduction to the substrate from the sensing region, by plasmaless dry etching with chlorine trifluoride gas. The voltage responsivity of the fabricated sensor was 1.3 × 104 V/W at a bias voltage of 1.5 V.
Corresponding author: Yoji Saito Cite this article Yoji Saito and Hiroki Murotani, Bolometer-Type Infrared Sensors Fabricated by Plasmaless Dry Etching, Sens. Mater., Vol. 16, No. 4, 2004, p. 191-198. |
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