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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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English 日本語
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 18, Number 3 (2006)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 125-130
S&M636 Research Paper of Special Issue Published: 2006 Fabrication of Silicon Master Using Dry and Wet Etching for Optical Waveguide by Thermal Embossing Technique [PDF] Jung-Hun Kim, Yu-Min Jung, Yu-Jeong Cho, Jong-Wan Kim, Yeong-Cheol Kim, Hwa-Il Seo, Kyung-Hwan Kim and Makoto Ishida (Received February 27, 2006; Accepted March 13, 2006) Keywords: optical waveguide, master, DRIE, wet etching, PFAS, HYBRIMER
Masters for the fabrication of planar optical waveguides were fabricated from (100) silicon wafers. Deep reactive ion etching (DRIE) and wet chemical etching were used to form smooth rectangular patterns on the masters. The roughness of the etched patterns was small enough to fabricate planar optical waveguides. The treatment of a master surface with oxide and perfluoalkylsilane (PFAS) improved further the separation of the master and the substrate. The materials that were used as underclad and core layers were organicinorganic hybrids called as-hybrid materials (HYBRIMERs). We successfully replicated the waveguides with the fabricated masters.
Corresponding author: Hwa-Il Seo Cite this article Jung-Hun Kim, Yu-Min Jung, Yu-Jeong Cho, Jong-Wan Kim, Yeong-Cheol Kim, Hwa-Il Seo, Kyung-Hwan Kim and Makoto Ishida, Fabrication of Silicon Master Using Dry and Wet Etching for Optical Waveguide by Thermal Embossing Technique, Sens. Mater., Vol. 18, No. 3, 2006, p. 125-130. |
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