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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 27, Number 1 (2015)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 125-133
S&M1053 Research Paper of Special Issue https://doi.org/10.18494/SAM.2015.1076 Published: January 29, 2015 Stress-Endurable Temperature Sensor Designed for Temperature Compensation on a Pressure Sensor [PDF] Young-Soon Moon, In-Cheol Ryu, Won-Ho Son, Si-Hun Lee and Sie-Young Choi (Received July 11, 2014; Accepted December 10, 2014) Keywords: temperature sensor, thermistor, MEMS, silicon strain gauge, pressure sensor
In this paper, the mechanical properties and temperature characteristics of a temperature sensor are presented for effective temperature compensation of a pressure sensor with a silicon strain gauge. A p-type diffused resistor of <100> direction on the (001) plane acts as a temperature sensor because its resistance varies with temperature. Unlike typical temperature sensors, the sensor's resistance is not affected by the stress on the diaphragm caused by its deformation under pressure. Thus, the temperature sensor is able to provide the correct resistance value corresponding to the temperature, regardless of the position of the diaphragm. Only 0.0062% of the resistance change of the temperature sensor is attributable to the mechanical stress of the diaphragm's deformation.
Corresponding author: Sie-Young Choi Cite this article Young-Soon Moon, In-Cheol Ryu, Won-Ho Son, Si-Hun Lee and Sie-Young Choi, Stress-Endurable Temperature Sensor Designed for Temperature Compensation on a Pressure Sensor, Sens. Mater., Vol. 27, No. 1, 2015, p. 125-133. |
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