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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 28, Number 2 (2016)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 113-120
S&M1161 Research Paper of Special Issue https://doi.org/10.18494/SAM.2016.1257 Published: February 24, 2016 Effect of Temperature and Humidity on Degradation of Single-Crystal Silicon Microbeam in MEMS Resonator [PDF] Taeko Ando, Mitsuhiro Shikida, and Kazuo Sato (Received October 6, 2015; Accepted December 28, 2015) Keywords: single-crystal silicon, fatigue strength, temperature, humidity, fracture surface
The fatigue property of single-crystal silicon was studied as a function of environmental conditions, both temperature and humidity, using a fan-shaped resonator. The fatigue tests were conducted in a custom-made measurement setup consisting of an environmental chamber, a heating system, a moisture generator unit, an electrical control system, and an observation system. As a result, it was found that the fatigue strength was markedly decreased under a highly humid condition, but the decrease in fatigue strength due to high humidity was suppressed at a high temperature. Scanning electron microscopy (SEM) observation of the fracture surface of a specimen revealed that the morphologies of the fracture surface depended on the applied stress without both temperature and humidity effects.
Corresponding author: Taeko Ando Cite this article Taeko Ando, Mitsuhiro Shikida, and Kazuo Sato, Effect of Temperature and Humidity on Degradation of Single-Crystal Silicon Microbeam in MEMS Resonator, Sens. Mater., Vol. 28, No. 2, 2016, p. 113-120. |
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