pp. 279-288
S&M1178 Research Paper of Special Issue https://doi.org/10.18494/SAM.2016.1273 Published: April 20, 2016 Simple Fabrication Method to Produce Flexible Electrode Capable of Soldering [PDF] Shigeru Toyama, Yasuhiro Tanaka, Yurie Ishikawa, and Kazuhiro Hara (Received November 9, 2015; Accepted December 16, 2015) Keywords: flexible sensor, laser printer, toner, electron beam evaporation, solder, thermally resistant film, wearable sensor
We have developed a simple method of producing a customized flexible electrode that is capable of soldering. This method consists of a few fabrication steps. The first step is the laser printing of a reversal pattern of the electrode on a thermally resistant plastic film. The second step is electron beam evaporation to fabricate multilayered metals, such as Ni-Ag, on the film. The third step is a kind of liftoff process, which is the removal of unnecessary metals together with the underlying toner by sonication after immersing the film in an organic solvent. After a thorough washing, we can obtain the desired patterned-electrode film. Several film electrodes were fabricated by this method. Consequently, some electrodes tightly adhered to the basal film and endured soldering by careful choice of the combination of metal layers. Although the conductance of these electrodes was less than the expected value estimated from the bulk metal conductance, the method can be used for the development of small electrodes. This time, we fabricated electrodes with several metals such as Ag, Au, and Pt at the surface, which seem not only useful as sensor electrodes but also as electrode pads. The method also may be useful for developing sensors on the laboratory scale.
Corresponding author: Shigeru ToyamaCite this article Shigeru Toyama, Yasuhiro Tanaka, Yurie Ishikawa, and Kazuhiro Hara, Simple Fabrication Method to Produce Flexible Electrode Capable of Soldering, Sens. Mater., Vol. 28, No. 4, 2016, p. 279-288. |