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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 30, Number 5(2) (2018)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 1081-1090
S&M1565 Research Paper of Special Issue https://doi.org/10.18494/SAM.2018.1716 Published: May 31, 2018 Miniaturization of MEMS Capacitive Accelerometers Fabricated Using Silicon-on-insulator-MEMS Technology [PDF] Jiannan Liu and Hideo Muro (Received July 31, 2017; Accepted November 16, 2017) Keywords: miniaturization, capacitive, beam configuration, sensitivity, resonant frequency
In our previous work, we studied capacitive micro-accelerometers fabricated using a simple silicon-on-insulator (SOI)-MEMS technology, studied the feasibility of an accelerometer with a beam length as long as the side length of the proof mass. This paper investigates the dependences of their sensitivities and resonant frequencies on the beam parameter and its configuration, and studies the method of designing the stuctures of capactive accelerometers with beam lengths as long as the side length of the proof mass for miniaturizing the device.
Corresponding author: Liu Jiannan Cite this article Jiannan Liu and Hideo Muro, Miniaturization of MEMS Capacitive Accelerometers Fabricated Using Silicon-on-insulator-MEMS Technology, Sens. Mater., Vol. 30, No. 5, 2018, p. 1081-1090. |
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