pp. 2823-2831
S&M1720 Research Paper https://doi.org/10.18494/SAM.2018.2022 Published: December 10, 2018 Design, Analysis and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism [PDF] Seyeong Seok, Sanghee Moon, Bumjoo Kim, and Geunbae Lim (Received June 7, 2018; Accepted July 17, 2018) Keywords: MEMS, gyroscope, simulation, prototype development
In this work, a novel micromachined monolithic triaxis gyroscope with advanced anchor mechanism is designed and its structural characteristics are analyzed. Micromachined gyroscopes are usually packed in small packages, causing a high squeeze film damping effect that reduces the quality factor of out-of-plane vibration, resulting in lowered out-of-plane sensitivity. The proposed gyroscope has a four-mass single structure wherein the opposing masses vibrate in the opposite direction perpendicular to the direction they face, with the help of ‘tree-shaped’ coupling springs. The simulated driving and x-, y-, z-axis sensing resonance frequencies are 19946, 20227, 20294, and 20361 Hz, respectively. Also, the prototype of the gyroscope was fabricated and tested. It showed a driving Q-factor of 106 and scale factor of 7 mV/deg/s.
Corresponding author: Bumjoo Kim and Geunbae LimCite this article Seyeong Seok, Sanghee Moon, Bumjoo Kim, and Geunbae Lim, Design, Analysis and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism, Sens. Mater., Vol. 30, No. 12, 2018, p. 2823-2831. |