pp. 2195-2212
S&M1924 Research Paper of Special Issue https://doi.org/10.18494/SAM.2019.2195 Published in advance: May 9, 2019 Published: July 9, 2019 Enhanced Sensitive Surface Acoustic Wave Device Designed for Nitric Oxide Gas Detection [PDF] Mei-Hui Chung, Rey-Chue Hwang, Jing-Jie Chiu, Min-Wen Yang, Tien-Tsan Hung, and Chi-Yen Shen (Received November 13, 2018; Accepted March 25, 2019) Keywords: surface acoustic wave, gas sensor, nitric oxide, single-phase unidirectional transducer
Surface acoustic wave (SAW) devices equipped with an electrode-width-controlled (EWC)/single-phase unidirectional transducer (SPUDT) and fabricated on ST-X quartz were proposed and found to have low insertion loss and single-mode capability. The devices were then used to determine parts-per-billion levels of nitric oxide (NO). A new modified equivalent circuit (EC) model was used to model and analyze the characteristics of SAW devices prior to their fabrication. The small-signal frequency responses (S21) obtained by simulation and measurement were consistent. A feedback-loop oscillator was used to design SAW-resonator-stabilized oscillators that provided stable oscillation. A SAW oscillator with an EWC/SPUDT structure was used to provide fundamental signals with high output power, induce high harmonic suppression, and realize long-term frequency stability. SAW devices with an EWC/SPUDT structure were coated with a Cu2+/PANI/WO3-sensitive layer to successfully determine parts-per-billion levels of NO. For a NO concentration of 50 ppb in dry air, the frequency shift in the SAW sensor with the EWC/SPUDT structure is 502 Hz. Moreover, the response and recovery time are 40 and 112 s, respectively. The sensitivity of NO detection for a concentration range of 20–80 ppb is approximately 4.2 Hz/ppb (~3.43 kHz/mg/m3).
Corresponding author: Chi-Yen ShenThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Mei-Hui Chung, Rey-Chue Hwang, Jing-Jie Chiu, Min-Wen Yang, Tien-Tsan Hung, and Chi-Yen Shen, Enhanced Sensitive Surface Acoustic Wave Device Designed for Nitric Oxide Gas Detection, Sens. Mater., Vol. 31, No. 7, 2019, p. 2195-2212. |