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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 31, Number 8(2) (2019)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2555-2563
S&M1956 Research Paper of Special Issue https://doi.org/10.18494/SAM.2019.2390 Published in advance: June 18, 2019 Published: August 19, 2019 Fabrication of IoT Force Sensor Module in Five-day Program for Students as Part of Nanotechnology Platform Japan Project [PDF] Kentaro Totsu, Masaaki Moriyama, Hiraku Watanabe, Toshiyuki Kikuta, Masahiro Hemmi, Masaaki Shoji, Takashi Yoshida, and Masataka Tatsuta (Received April 3, 2019; Accepted May 20, 2019) Keywords: IoT, MEMS, piezoresistive sensor, WiFi, wireless
An IoT force sensor module was fabricated and demonstrated in a five-day practical program for students, as part of the Nanotechnology Platform Japan project. The module mainly consists of a silicon-based piezoresistive micro-electromechanical system (MEMS) force sensor and a microcontroller with a WiFi wireless communication function. The MEMS force sensor was fabricated on a 4-inch silicon wafer in four days by each student. The IoT force sensor module was connected to an IoT cloud server via the internet and was successfully monitored by a smartphone. All of the fabrication, implementation, and testing processes were carried out by students at Hands-On-Access Fabrication Facility, Tohoku University.
Corresponding author: Kentaro Totsu  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Kentaro Totsu, Masaaki Moriyama, Hiraku Watanabe, Toshiyuki Kikuta, Masahiro Hemmi, Masaaki Shoji, Takashi Yoshida, and Masataka Tatsuta, Fabrication of IoT Force Sensor Module in Five-day Program for Students as Part of Nanotechnology Platform Japan Project, Sens. Mater., Vol. 31, No. 8, 2019, p. 2555-2563. Media Contents |
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