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Vol. 34, No. 8(3), S&M3042

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Sensors and Materials, Volume 32, Number 3(3) (2020)
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pp. 1123-1131
S&M2165 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2020.2637
Published: March 31, 2020

Development of Organic Gas Sensor Using Quartz Crystal Microbalance Coated with Plasma-polymerized Films [PDF]

Hidenobu Aizawa, Shin-ichi Kusakari, Kazunori Yamada, Kazutoshi Noda, and Hiroshi Habe

(Received September 27, 2019; Accepted January 14, 2020)

Keywords: quartz crystal microbalance (QCM), plasma polymerization, thin film, gas sensor, volatile organic compound (VOC)

In this study, we developed a gas detection membrane that can selectively sense volatile organic compounds used in the industry and research. 4-(Chloromethyl) styrene (CMS) and 4-vinylbenzoic acid (VBA) films were coated on a quartz crystal microbalance (QCM) using plasma polymerization. The response sensitivity (RS) to each organic gas in the plasma-polymerized (pp) film was calculated and evaluated from the amount of frequency shift in the organic gas adsorption/desorption of the QCM. In pp-CMS coated on the QCM, dichloromethane was adsorbed more than in other pp-films, possibly because pp-CMS had a higher affinity with chloro groups of dichloromethane. By contrast, pp-VBA had a high RS to alcohol-based solvents containing hydroxy groups, especially methanol. From the results, the gas selectivity of the pp films was suggested to depend on their functional groups.

Corresponding author: Hidenobu Aizawa

This work is licensed under a Creative Commons Attribution 4.0 International License.

Cite this article
Hidenobu Aizawa, Shin-ichi Kusakari, Kazunori Yamada, Kazutoshi Noda, and Hiroshi Habe, Development of Organic Gas Sensor Using Quartz Crystal Microbalance Coated with Plasma-polymerized Films, Sens. Mater., Vol. 32, No. 3, 2020, p. 1123-1131.