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S&M2642 Research Paper of Special Issue https://doi.org/10.18494/SAM.2021.3388 Published: August 10, 2021 Simulation of Effect of Ar Flow Rate on Silicon Ingot Growth in Directional Solidification System [PDF] Xueyan Li, Yao-Chung Yang, Chao-Ming Hsu, Hsien-Wei Tseng, Jie Zhang, and Cheng-Fu Yang (Received March 23, 2021; Accepted June 2, 2021) Keywords: simulation, Ar flow rate, silicon ingot growth, polycrystalline silicon, directional solidification system
We used a numerical analysis method to find the effect of the Ar flow rate on the silicon ingot growth in a directional solidification system (DSS) and to find the optimal Ar flow rate for the growth of a polycrystalline silicon ingot. The simulation software used was Fluent and the finite volume method was used to construct the boundary conditions. We used the freeze/melt model to perform the thermal field analysis of ingot growth in a DSS furnace. In the analysis, we considered the effect of the Ar flow rate on the thermal conduction, thermal convention, and thermal radiation, which affect the growth of a silicon ingot in a DSS furnace. We found that the Ar flow rate, thermal pads, heaters, and insulated side panels usually affected the growth of a silicon ingot in a DSS furnace. We also simulated the effect of the Ar flow rate on the temperature gradient, heat dissipation rate, and the shape of the solid-liquid phase while changing the temperature field. The analysis results can be used to adjust and optimize the internal parts of a DSS furnace to optimize the process of silicon ingot growth.
Corresponding author: Chao-Ming Hsu, Cheng-Fu YangThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Xueyan Li, Yao-Chung Yang, Chao-Ming Hsu, Hsien-Wei Tseng, Jie Zhang, and Cheng-Fu Yang, Simulation of Effect of Ar Flow Rate on Silicon Ingot Growth in Directional Solidification System, Sens. Mater., Vol. 33, No. 8, 2021, p. 2607-2618. |