pp. 5109-5115
S&M3855 Research Paper of Special Issue https://doi.org/10.18494/SAM4810 Published: December 3, 2024 Card-type Piezoelectric Energy Harvesters of Pb(Zr,Ti)O3 Thin Films on Stainless Steel Foils [PDF] Daiki Teramoto, SangHyo Kweon, and Isaku Kanno (Received November 29, 2023; Accepted December 25, 2023) Keywords: energy harvesting, piezoelectric, PZT thin film, flexible
In this study, we fabricated flexible card-type piezoelectric energy harvesters (PEHs) composed of Pb(Zr,Ti)O3 (PZT) thin films on stainless steel foils for wearable applications and measured their power generation performance under hand-bending motion. The PZT thin films with preferential c-axis orientation were deposited on LaNiO3 (LNO)-coated stainless steel substrates of 30 μm in thickness by RF magnetron sputtering. Five PZT thin-film PEH elements were stacked with each connected in parallel. The stack was placed in the middle of a card divided into two parts. We measured the output power while applying a large hand-bending deformation to the card-type PEHs. During periodic bending motion at 1 Hz the maximum output power reached 177 μW at a load resistance of 80 kΩ, and we successfully turned 10 LEDs on intermittently.
Corresponding author: Isaku KannoThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Daiki Teramoto, SangHyo Kweon, and Isaku Kanno, Card-type Piezoelectric Energy Harvesters of Pb(Zr,Ti)O3 Thin Films on Stainless Steel Foils, Sens. Mater., Vol. 36, No. 12, 2024, p. 5109-5115. |