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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 38, Number 3(3) (2026)
Copyright(C) MYU K.K.
pp. 1401-1415
S&M4384 Research paper
https://doi.org/10.18494/SAM5943
Published: March 23, 2026

Enhanced Real-time Monitoring of Laser-induced Plasma Using Combined Electric and Magnetic Fields [PDF]

Chau-Shing Wang, Yuan-Jen Chang, and Yi-Gang Chiu

(Received September 20, 2025; Accepted February 24, 2026)

Keywords: laser percussion drilling, laser-induced plasma, micromachining, magnetic field, electric field

Laser drilling is widely used in precision manufacturing industries, such as those of multilayer circuit boards, medical materials, and aerospace components. Laser drilling can easily achieve microdrilling with hole diameters smaller than 1 mm, which is unattainable with traditional mechanical drilling. Because of the high processing speed of laser drilling, real-time monitoring of the drilling process has always been a challenge. In this study, we investigate the enhancement of real-time monitoring of laser-induced plasma by integrating electric and magnetic fields. A horizontal magnetic field perpendicular to an external electric field is applied above the surface of the processed material, and a vertical probe copper electrode is used to detect the plasma. Experimental results confirm theoretical predictions, demonstrating that the combination of magnetic and electric fields enhances the plasma signal detection intensity and increases drilling depth.

Corresponding author: Yuan-Jen Chang


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Cite this article
Chau-Shing Wang, Yuan-Jen Chang, and Yi-Gang Chiu, Enhanced Real-time Monitoring of Laser-induced Plasma Using Combined Electric and Magnetic Fields, Sens. Mater., Vol. 38, No. 3, 2026, p. 1401-1415.



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