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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 24, Number 7 (2012)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 413-418
S&M895 Research Paper https://doi.org/10.18494/SAM.2012.800 Published: October 16, 2012 Determination of the Orientations and Microstructures of Pb(Zr,Ti)O Films Fabricated on Different Substrate Structures [PDF] Jae-Wung Lee, Yusuke Kawai, Shuji Tanaka and Masayoshi Esashi (Received August 16, 2011; Accepted November 9, 2011) Keywords: PZT, film, orientation, membrane
Piezoelectric (PZT) films with different orientations and microstructures were fabricated on different substrate structures in one chip. To investigate the substrate structural effect of Pb(Zr0.52Ti0.48) films, different substrate structures of a Pt membrane and Pt on a Si substrate (called platinized Si) were fabricated after Si back-side etching. The PZT films were fabricated on the prepared substrates by RF magnetron sputtering with a single oxide target. After the annealing of a PZT film, different microstructures and Forientations were observed from different parts of the sample. The PZT film on the Pt membrane has (001) orientation and grains of ~1 µm size. On the other hand, the PZT film on platinized Si has (111) orientation and grains of ~3 µm size.
Corresponding author: Jae-Wung Lee Cite this article Jae-Wung Lee, Yusuke Kawai, Shuji Tanaka and Masayoshi Esashi, Determination of the Orientations and Microstructures of Pb(Zr,Ti)O Films Fabricated on Different Substrate Structures, Sens. Mater., Vol. 24, No. 7, 2012, p. 413-418. |
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