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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
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Sensors and Materials, Volume 26, Number 4 (2014)
Copyright(C) MYU K.K.
pp. 245-251
S&M988 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2014.968
Published: May 27, 2014

Mid-infrared Type-II InAs/GaSb Superlattice Photodiodes Fabricated on InP Substrates [PDF]

Kohei Miura, Yasuhiro Iguchi, Tsukuru Katsuyama, Yuichi Kawamura, Junpei Murooka, Haruyoshi Katayama, Shota Sugano, Tomoko Takekawa and Masafumi Kimata

(Received November 28, 2013; Accepted February 17, 2014)

Keywords: GaSb, InAs, type-II superlattice, InP, mid-infrared photodiode

Type-II InAs/GaSb superlattices (SLs) are attractive material systems for mid-infrared photodiodes (PDs) with higher detectivities than the conventional HgCdTe. GaSb substrates are generally used for the epitaxial growth of these type-II SLs. However, in the case of back-illuminated PDs, the GaSb substrate should be nearly removed because of its strong absorption of mid-infrared light. In this study, infrared PDs with a cut-off wavelength of 7 µm were fabricated for the first time by using the 100 period of InAs/GaSb SLs grown on an InP substrate, which has much less absorption of mid-infrared light. The dark current density at the reverse bias of −0.1 V and at a temperature of 112 K was 33.0 mA/cm2. External quantum efficiency over 10% at the wavelength of 5 µm was obtained.

Corresponding author: Kohei Miura


Cite this article
Kohei Miura, Yasuhiro Iguchi, Tsukuru Katsuyama, Yuichi Kawamura, Junpei Murooka, Haruyoshi Katayama, Shota Sugano, Tomoko Takekawa and Masafumi Kimata, Mid-infrared Type-II InAs/GaSb Superlattice Photodiodes Fabricated on InP Substrates, Sens. Mater., Vol. 26, No. 4, 2014, p. 245-251.



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