pp. 245-251
S&M988 Research Paper of Special Issue https://doi.org/10.18494/SAM.2014.968 Published: May 27, 2014 Mid-infrared Type-II InAs/GaSb Superlattice Photodiodes Fabricated on InP Substrates [PDF] Kohei Miura, Yasuhiro Iguchi, Tsukuru Katsuyama, Yuichi Kawamura, Junpei Murooka, Haruyoshi Katayama, Shota Sugano, Tomoko Takekawa and Masafumi Kimata (Received November 28, 2013; Accepted February 17, 2014) Keywords: GaSb, InAs, type-II superlattice, InP, mid-infrared photodiode
Type-II InAs/GaSb superlattices (SLs) are attractive material systems for mid-infrared photodiodes (PDs) with higher detectivities than the conventional HgCdTe. GaSb substrates are generally used for the epitaxial growth of these type-II SLs. However, in the case of back-illuminated PDs, the GaSb substrate should be nearly removed because of its strong absorption of mid-infrared light. In this study, infrared PDs with a cut-off wavelength of 7 µm were fabricated for the first time by using the 100 period of InAs/GaSb SLs grown on an InP substrate, which has much less absorption of mid-infrared light. The dark current density at the reverse bias of −0.1 V and at a temperature of 112 K was 33.0 mA/cm2. External quantum efficiency over 10% at the wavelength of 5 µm was obtained.
Corresponding author: Kohei MiuraCite this article Kohei Miura, Yasuhiro Iguchi, Tsukuru Katsuyama, Yuichi Kawamura, Junpei Murooka, Haruyoshi Katayama, Shota Sugano, Tomoko Takekawa and Masafumi Kimata, Mid-infrared Type-II InAs/GaSb Superlattice Photodiodes Fabricated on InP Substrates, Sens. Mater., Vol. 26, No. 4, 2014, p. 245-251. |