Vol. 17 No. 4
Special Issue on the Fourth Workshop on Physical Chemistry of Wet Etching of Silicon (PCWES)
Guest Editor: Mojtaba Kahrizi (Concordia University)
S&M595Research Paper of Special Issue |
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S&M595 Simulation of Anisotropic Etching of Alpha-Quartz for Computer-Aided-Design System Hisanori Hayashi and Toshitsugu Ueda |
S&M596Research Paper of Special Issue |
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S&M596 Characterization of Orientation-Dependent Etching Properties of Quartz: Application to 3-D Micromachining Simulation System Di Cheng, Kazuo Sato, Mitsuhiro Shikida, Atsushi Ono, Kenji Sato, Kazuo Asaumi and Yasuroh Iriye |
S&M597Research Paper of Special Issue |
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S&M597 Arrhenius and Non-Arrhenius Behaviour During Anisotropic Etching Miguel A. Gosálvez, Risto M. Nieminen and Kazuo Sato |
S&M598Research Paper of Special Issue |
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S&M598 Silicon Wet Etch Anisotropy: Analysis of the Impact of {111}-, {110}-, {100}- Terrace Widths Irina Stateikina, Leslie M. Landsberger, Mojtaba Kahrizi, Nazmul Hoque and Victo Rossokhaty |
S&M599Research Paper |
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S&M599 A Novel Fiber Optic Biosensor for On-Line Monitoring of Cell Cultivation Lei Zeng, Chu-Tian Zhang, Wei-Ning Huang, Jia Zhou, Quan Liu and Yi-Ping Huangg |
S&M600Research Paper |
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S&M600 Polyvinyl Alcohol-co-Styrene Sulfonate/FeCl2 Composite as Humidity Sensing Material Il-Jin Kim, Sang-Do Han, Ishwar Singh, Hi-Deok Lee and Jin Suk Wang |
Cover of this Issue |
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