Vol. 11 No. 6
Taiwanese Special Issue
Guest Editor: Yao Cheng (Synchrotron Radiation Research Center)
S&M375Research Paper of Special Issue |
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S&M375 Status of HARMST in Taiwan Yao Cheng |
S&M376Research Paper of Special Issue |
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S&M376 Manufacturing Processes for LIGA Spinnerets B.-Y. Shew, Y. Cheng, C.-H. Lin, W.-P. Ma, G.-J. Huang, C.-L. Kuo, S.-C. Tseng, D.-S. Lee and G.-L. Chang |
S&M377Research Paper of Special Issue |
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S&M377 Behavior of the Developing Process for Ultradeep Microstructures Cheng-Tang Pan, Hsiharng Yang, Horng-Jee Wang and Min-Chieh Chou |
S&M378Research Paper of Special Issue |
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S&M378 Ultralow-Stress Silicon-Rich Nitride Films for Microstructure Fabrication Ming-Cheng Cheng, Chin-Piao Chang, Wen-Sheh Huang and Ruey-Shing Huang |
S&M379Research Paper of Special Issue |
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S&M379 Fabrication of 3-D Microcoils with Ferromagnetic Cores Using a Standard CMOS Process Lungjieh Yang, Kuangyeu Hsieh, Jinghung Chiou, Jennyi Chen, Chienliu Chang and Peizen Chang |
S&M380Research Paper of Special Issue |
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S&M380 Fabrication of a Sensitive Germanium Microbolometer for Tympanic Thermometry Chung-Nan Chen and Jin-Shown Shie |
S&M381Research Paper of Special Issue |
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S&M381 Fabrication and Study of a Shallow-Gap Pirani Vacuum Sensor with a Linearly Measurable Atmospheric Pressure Range Bruce C. S. Chou, Chung-Nan Chen and Jin-Shown Shie |
Cover of this Issue |
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