Young Researcher Paper Award 2023
🥇Winners

Notice of retraction
Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語

Template
English

Publisher
 MYU K.K.
 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.


MYU Research

(proofreading and recording)


MYU K.K.
(translation service)


The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Sensors and Materials, Volume 17, Number 5 (2005)
Copyright(C) MYU K.K.
pp. 289-298
S&M607 Research Paper of Special Issue
Published: 2005

Design and Fabrication of Air-Bridge CPW using Porous Silicon and MEMS Technology [PDF]

Young-Min Kim, Jong-Hyun Lee, Seong-Ho Kong, and Kwang-Man Lee

(Received August 25, 2004; Accepted December 6, 2004)

Keywords: porous silicon micromachining, TMAH etching, air-bridge structure, multi-oxidation, coplanar waveguide

This paper proposes a three-dimensional structure for an RF passive device using a thick oxidized porous silicon layer (OPSL). The OPS air-bridge was fabricated using an anodic reaction, reactive ion etching (RIE), tetramethyl ammonium hydroxide (TMAH) etching, and a multistep oxidation process. The problem of the high dielectric loss of a waveguide on silicon can be solved using a thick OPS air-bridge. The three dimensional structures were fabricated using a 20 wt.% TMAH solution at 80℃ for 3 h, and the thickness of the micromachined OPS air-bridge was 10 µm. A coplanar waveguide (CPW) structure was also fabricated on the OPSL air-bridge for RF application. The fabricated structure was 2 mm in length, and the width of the signal line and the gap between the ground and the signal lines were 100 µm and 20 µm, respectively. This process is well compatible with conventional complementary metal oxide semiconductor (CMOS) fabrication process without post-processing, and does not require an additional mask for silicon etching.

Corresponding author: Kwang-Man Lee


Cite this article
Young-Min Kim, Jong-Hyun Lee, Seong-Ho Kong, and Kwang-Man Lee, Design and Fabrication of Air-Bridge CPW using Porous Silicon and MEMS Technology, Sens. Mater., Vol. 17, No. 5, 2005, p. 289-298.



Forthcoming Regular Issues


Forthcoming Special Issues

Applications of Novel Sensors and Related Technologies for Internet of Things
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)
Call for paper


Special Issue on Advanced Data Sensing and Processing Technologies for Smart Community and Smart Life
Guest editor, Tatsuya Yamazaki (Niigata University)
Call for paper


Special Issue on Advanced Sensing Technologies and Their Applications in Human/Animal Activity Recognition and Behavior Understanding
Guest editor, Kaori Fujinami (Tokyo University of Agriculture and Technology)
Call for paper


Special Issue on International Conference on Biosensors, Bioelectronics, Biomedical Devices, BioMEMS/NEMS and Applications 2023 (Bio4Apps 2023)
Guest editor, Dzung Viet Dao (Griffith University) and Cong Thanh Nguyen (Griffith University)
Conference website
Call for paper


Special Issue on Piezoelectric Thin Films and Piezoelectric MEMS
Guest editor, Isaku Kanno (Kobe University)
Call for paper


Special Issue on Advanced Micro/Nanomaterials for Various Sensor Applications (Selected Papers from ICASI 2024)
Guest editor, Sheng-Joue Young (National United University)
Conference website
Call for paper


Copyright(C) MYU K.K. All Rights Reserved.