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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 30, Number 4(1) (2018)
Copyright(C) MYU K.K.
pp. 757-766
S&M1536 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2018.1798
Published: April 13, 2018

Gas Sensing System Composed of IC-Foundry-Compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing [PDF]

Xin Peng, Yanqing Lv, Pengcheng Xu, Xinxin Li, Haitao Yu, and Jiaqiang Xu

(Received November 4, 2017; Accepted February 13, 2018)

Keywords: MEMS, gas sensor, microcantilever, MOF-5, PLL

Gas sensors based on resonant microcantilevers have drawn significant attention in the application of trace molecule detection. In order to realize the practical application of microcantilever-based sensors, three critical points still must be addressed: inexpensive and batch-fabricated microcantilevers, high-performance sensing material and easily operated signal-processing circuit with intelligent software. Herein, a gas sensing system with a multi-and-interdisciplinary collaboration mode is proposed. A low-cost and IC-foundry-compatible fabrication technology of the resonant microcantilever is developed. For the example of trace aniline detection, a scalable metal-organic-framework (MOF) material of MOF-5 with ultrahigh surface area and abundant specific aniline-adsorption sites is prepared. For sensing signal processing, an interface circuit with intelligent data processing capability is designed. Composed of the low-cost microcantilever, the advanced MOF-5 sensing material, and the intelligent signal process, the new gas sensing system shows satisfactory performance for trace aniline vapor detection.

Corresponding author: Xinxin Li, Haitao Yu, Jiaqiang Xu


Cite this article
Xin Peng, Yanqing Lv, Pengcheng Xu, Xinxin Li, Haitao Yu, and Jiaqiang Xu, Gas Sensing System Composed of IC-Foundry-Compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing , Sens. Mater., Vol. 30, No. 4, 2018, p. 757-766.



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