The Trillion Sensors (TSensors) Initiative was started in 2013 in the US alongside the global economic tide of the Internet of things (IoT) to pursue a society in which trillion sensors are connected to networks worldwide so that global problems may be solved in order to attain a utopian world, Abundance. It will provide all the people with food, medicine and healthcare, a clean environment, disaster resilience, and clean energy. TSensors as a subset of the IoT that is becoming widely prevalent in recent years has been enabled by micro-electromechanical systems (MEMS) which have undergone dramatic growth in the last few decades and have been playing an essential role in the emerging world of IoT. One of the most essential technologies that has made possible the remarkable growth of MEMS is the deep reactive ion etching (DRIE) based on the Bosch process patented by Robert Bosch more than 20 years ago. The technology has been continuously developed to enhance its capability for over 20 years under the author's lead, in order to broaden the range of application of MEMS in automotives, gaming, smartphones, and sensor networks in the world of IoT.