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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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English 日本語
Instructions for manuscript preparation
English 日本語
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MYU K.K.
Sensors and Materials
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The Art of Writing Scientific Papers
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 21, Number 1 (2009)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 37-51
S&M747 Research Paper https://doi.org/10.18494/SAM.2009.543 Published: April 16, 2009 Gettering by CF4-Ar Plasma-Treated Titanium within Anodically Bonded Glass-Silicon Microcavities [PDF] Surajit Kumar Hazra, Nam-kuk Kim, Jaehong Park, Byoungdoo Choi, Sangmin Lee, Tae-young Choi and Dong-Il "Dan" Cho (Received May 7, 2008; Accepted September 29, 2008) Keywords: getter, titanium, plasma, fluorine, anodic bonding, XPS
The gettering of CF4-Ar plasma-treated titanium films has been studied by X-ray photoelectron spectroscopy, optical microscopy and field emission scanning electron microscopy. This study shows a convenient way to eliminate the native oxide impurities from the titanium surface before getter activation. A vacuum-packaged environment and the activation conditions for 2 mm × 1.8 mm × 2500 Å titanium getter films were realized by a glass-silicon anodic bonding process at 400°C and a 40 min thermal treatment at 500°C, respectively. The surface characteristics of the titanium films were analyzed before and after packaging to determine the role of fluorine. The fluorine coverage on the titanium surface as a result of plasma treatment reveals a new gettering mechanism with high oxygen-capturing potential.
Corresponding author: Dong-Il “Dan” Cho Cite this article Surajit Kumar Hazra, Nam-kuk Kim, Jaehong Park, Byoungdoo Choi, Sangmin Lee, Tae-young Choi and Dong-Il "Dan" Cho, Gettering by CF4-Ar Plasma-Treated Titanium within Anodically Bonded Glass-Silicon Microcavities, Sens. Mater., Vol. 21, No. 1, 2009, p. 37-51. |
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